Technologies

Fraunhofer IMS can rely on years of experience and technological expertise in the development and manufacture of optical sensors for numerous applications.

Technologies in the Business Unit CMOS Image Sensors

The technological competencies and available optical components form a stable basis for the development of optical sensors for numerous applications.

The technological spectrum for high-performance CMOS image sensors

CMOS image sensor with SPAD array
© Fraunhofer IMS
CMOS image sensor with SPAD array

The technological basis for the extensive range of optical sensors is CMOS technology. Fraunhofer IMS has been developing and manufacturing CMOS image sensors for more than 30 years. Initially the standard CMOS process  provided various photodiodes and enabled the first product developments, but later special optoelectronic components and process steps were developed that continuously improved the properties and versatility of the sensor solutions. Special diodes and detector elements such as

for various applications like X-ray, spectroscopy, time-of-flight, LiDAR or time-delay integration have been developed and integrated in the standard CMOS process. Furthermore, special process options such as

  • Stitching
  • UV-transparent passivation
  • planarization
  • colour filters
  • microlenses

are available for product developments.

The 0.35µm CMOS technology installed at Fraunhofer IMS is qualified according to the automotive standard ISO TS16949 and therefore extremely stable and reliable. The integration of a new component into this process means extreme effort in development and qualification before product development can start.

A recently available technology basis for the optical sensors is the 3-D integration in the MST Lab&Fab of Fraunhofer IMS. The detector elements and the readout circuit are located on two independent chips, which are connected by a soldering or bonding process. This hybrid integration of "chiplets" takes place either as a chip-to-wafer or, for larger quantities, as a wafer-to-wafer process. The advantages are obvious: the two wafers or chips can be selected and optimized independently. For SPAD arrays, for example, this means that a compromise between "good SPAD properties" and "compact electronics" is no longer necessary. The SPADs can be optimized for the right wavelength and the electronics can be accommodated in smaller structure sizes on the smallest surface area. The 3-D integration technology is currently in the qualification phase.

With the technology portfolio available for optical sensors, Fraunhofer IMS is able to meet the highest customer requirements and offer application-specific sensors from the initial idea to pilot production.

 

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LiDAR

Fraunhofer IMS develops and manufactures 3D image sensors for flash LiDAR camera systems and researches methods for embedded signal evaluation.

CSPAD

CSPAD detectors unite highly sensitive three-dimensional imaging with secure algorithms for the efficient application even in changing weather conditions.

Backside Illumination Sensor

Fraunhofer IMS develops and uses processes and newest bonding technologies on chip and wafer level for the production of backside illuminated optical sensors.

CMOS-CCD

Fraunhofer IMS develops customer-specific CMOS-CCD structures and sensor with extremely high dynimc range for TDI applications.

ToF-Sensors

Fraunhofer IMS develops special hish-resolution sensors for indirect time-of-flight applications.

Line Sensors

Fraunhofer IMS develops customer-specific line sensors with high sensitivity and gating and short-pulse ability for applications in the field of spectroscopy.

Silicon Photomultiplier (SiPM)

Fraunhofer IMS develops and produces both analog and digital silicon photomultipliers for the detection of photons in various applications (e.g. PET).

Overview Pages

CMOS (Home)

Fraunhofer IMS has the experience and the competences to develop custom-made CMOS image sensors and manufacture them in an 8-inch CMOS line.

Applications

The optical sensors of Fraunhofer IMS are tailored to the respective situation and are used in numerous applications ranging from autonomous driving to quantum technology.

Customer Benefits

As a partner for innovative product developments in the field of optical sensors, Fraunhofer IMS offers everything from a single source: from the initial idea to pilot production.

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