Microsystems Technogy Lab&Fab
Microsystems technology and microelectronics merge closely to create compact „intelligent“ sensors and actors. The Microsystems technology (MST or MOEMS micro opto electro-mechanical systems) expands the CMOS-technology. MST provides sensor and actor functions, CMOS supplies the electronics. MST processes use semiconductor equipment and benefit from the versatile experience which has been built up by the silicon semiconductor technology.